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"Next Generation Technologies for Semiconductor Failure Analysis"

Tuesday, 19 September 2023, 2pm ET

The continuous downscaling of semiconductor technology nodes imposes ever more stringent requirements on metrology and failure analysis tools. This webinar will discuss recent advances in the following tools for failure analysis:

• Energy dispersive spectrometry (EDS) ­– EDS on a scanning electron microscope (SEM) and transmission electron microscope (TEM) is a powerful tool to chemically characterize features at the nano-scale. Challenges do arise when pushing EDS to a spatial resolution often required for the analysis of semiconductor devices.  Developments in EDS detector hardware, as well as software routines allow the analyst to overcome these challenges.
   
• Atomic Force Microscopy (AFM) – AFM’s unmatched sub-nanometer resolution and wide variety of electrical measurement modes make it an essential characterization tool in present and future semiconductor devices.
   
• Confocal Raman Imaging – Raman spectroscopy is a powerful tool for measuring local mechanical stress in semiconductor materials and this plays a crucial role in the production of reliable devices. Confocal Raman Imaging takes this capability to a new level of high speed and high resolution stress mapping.

EDS, AFM, and Confocal Raman Imaging will play a crucial role in failure analysis studies of the world’s most advanced semiconductor devices.

Speakers:

Richard McLaughlin, PhD, Applications Scientist, Oxford Instruments

• Dr. Richard McLaughlin has been an Applications Specialist at Oxford Instruments Nanoanalysis since 1998. He has over 30 years of experience with Scanning Electron Microscopy (SEM), Energy Dispersive X-Ray Spectroscopy (EDS), Electron Backscatter Diffraction (EBSD), and X-Ray Diffraction.  Dr. McLaughlin graduated with a Ph.D. in Geology from McMaster University, Canada.

F. Ted Limpoco, PhD, Applications Scientist, Oxford Instruments

• Dr. Ted Limpoco is an Applications Specialist at Oxford Instruments Asylum Research. He has over 15 years of AFM experience in Nanoelectrical, Nanomechanical, and Nanotribology techniques. He was previously a Postdoctoral Fellow at the University of Illinois at Urbana-Champaign and has a Ph.D. in Chemistry from the University of Florida.

Wei Liu, PhD, Applications Scientist, Oxford Instruments

• Dr. Wei Liu has been an Applications Specialist at Oxford Instruments WITec since 2010. He has over 20 years of experience with Raman Spectroscopy, Raman Imaging, Confocal Microscopy, Atomic Force Microscopy, Scanning Near Field Optical Microscopy, and Scanning Probe Microscopy.  Dr. Liu graduated with a Ph.D. in Biophysics from the University of California, Riverside.

Offered Free by: Oxford Instruments
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